

3Dresyn NMF HAR1 Bio, Biocompatible High Aspect Ratio ultra rigid photopolymer for nano and micro fabrication
3Dresyn NMF HAR1 Bio has these features and benefits:
- UV & EB curable organic high aspect ratio & ultra rigid photopolymer for nano and micro fabrication, such as printing of ultra rigid stamps for Nano Imprinting lithography NIL and negative photoresists for standard UV lithography & PCB technology processing, UV patterning of core and cladding
- resin with properties similar to quartz glass
- UV curable: excellent photoreactivity at 250-410 nm with minimum energy dosage
- Electron beam EB curable
- compatible and blendable with our 3Dreyns for nano & micro fabrication
- Shore hardness D90
- biocompatible, ultra safe without any toxic pictograms
- medium tensile and flexural strength <40 MPa
- ultra rigid (Young modulus 4000-6000 MPa)
- elongation <1%
- high temperature resistance up to 290 ºC (short term) without deformation
- High deflection temperature >290ºC
- imprint Temperature > 160ºC
- synthetic resin source
- durable
- high impact/shattering resistance
- excellent balance of low viscosity for easy imprinting and low penetration
- high refractive index 1.45-1.55
- very high resolution (printing resolution of less than 10 nm)
- medium shrinkage <13%
- organo-tin free
- high optical clarity
- high durability, non degradable
- excellent bonding, low risk of debonding
- medium-high mechanical properties, with low risk of cracking
- very low degassing at high vacuum
- ultra low oxygen sensitivity despite its ultra low viscosity
- high mechanical stability
- long shelf life of 1 year
- excellent spin coating application
- excellent etching with Reactive Ion Etching
- excellent stability and chemical resistance to a wide range of wet chemistries used in the clean room
- ultra low penetration
- low surface tension with good release and demolding properties
- 100% organic (free of inorganic materials)
- optionally it can contain hydroxyl groups for bonding release agents, such as perfluorodecyltrichlorosilane (FDTS)
- no thermal treatment is required
- easy processing with standard lithography equipment
- easy removal of uncured resin with ketones, alcohols and esters
Applications
- easy & cost effective transparent ultra rigid stamp fabrication, alternative to quartz or electroplated stamps
- ideal for mass sensors based on UV-NIL, ALD and RIE
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